Optimal Design of the Monolithic Flexure Mount for Optical Mirror Using Response Surface Method

An optimal design of a simple beam-shaped flexure hinge mount supporting an optical mirror is presented. assembly opto-mechanically coupled system as the and mechanical behaviors interact. This side-supporting flexible in radial direction rigid for remaining degrees freedom to support without transferring thermal load. Through thermo-elastic, eigenvalue analysis, opto-mechanical performance was predicted establish objective functions optimization. The key parameters this are thickness length. To find values parameters, response surface analysis performed using experiment based on nested FCD. Optimal candidates were derived from shape confirmed through Opto-mechanical validation analysis.